The scientific journal Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics is included in the Scopus database. Based on 2020, SJR is 0.403. Publisher country is Estados Unidos. The main subject areas of published articles are Process Chemistry and Technology, Electrical and Electronic Engineering, Surfaces, Coatings and Films, Materials Chemistry, Electronic, Optical and Magnetic Materials, Instrumentation.
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Subject area
| Percentile | Scopus ASJC Code | Scopus Sub-Subject Area | Quartile |
|---|---|---|---|
| 57 | 2508 | Surfaces, Coatings and Films | 2 |
| 58 | 2505 | Materials Chemistry | 2 |
| 49 | 2504 | Electronic, Optical and Magnetic Materials | 3 |
| 50 | 1508 | Process Chemistry and Technology | 2 |
| 57 | 2208 | Electrical and Electronic Engineering | 2 |
| 60 | 3105 | Instrumentation | 2 |
| CiteScore | Source ID |
|---|---|
| 2,8 | https://scopus.com/sourceid/21100329308 |
- ISSN: 21662754
- The scientific journal is included in the Scopus database.