Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

The scientific journal Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics is included in the Scopus database. Based on 2020, SJR is 0.403. Publisher country is United States of America. The main subject areas of published articles are Process Chemistry and Technology, Electrical and Electronic Engineering, Surfaces, Coatings and Films, Materials Chemistry, Electronic, Optical and Magnetic Materials, Instrumentation.

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Subject area

Percentile	Scopus ASJC Code	Scopus Sub-Subject Area	Quartile
57	2508	Surfaces, Coatings and Films	2
58	2505	Materials Chemistry	2
49	2504	Electronic, Optical and Magnetic Materials	3
50	1508	Process Chemistry and Technology	2
57	2208	Electrical and Electronic Engineering	2
60	3105	Instrumentation	2

CiteScore	Source ID
2.8	https://scopus.com/sourceid/21100329308